382
MICROSCOPES
SPECIFICATIONS
Model No. FS70 FS70-TH FS70Z FS70Z-TH FS70L FS70L-TH FS70L4 FS70L4-TH
Order No. 378-184-1 378-184-3 378-185-1 378-185-3 378-186-1 378-186-3 378-187-1 378-187-3
Model No. FS70-S FS70-THS FS70Z-S FS70Z-THS FS70L-S FS70L-THS FS70L4-S FS70L4-THS
Order No. 378-184-2 378-184-4 378-185-2 378-185-4 378-186-2 378-186-4 378-187-2 378-187-4
Focus With concentric coarse and fine focusing wheels (right and left)
adjustment (50mm travel range, 0.1mm/rev. for fine adjustment, 3.8mm/rev. for coarse adjustment)
Trinocular tube Image Erect image
Pupil distance Siedentopf type, adjustment range: 51 - 76mm
Field number 24
Tilt angle 0° - 20° (only -TH, -THS models)
Optical pass 50/50
-1
100/0 or 50/50
-1
100/0 or 100/0 or 100/0 or 100/0 or 100/0 or
ratio 0/100
-2
0/100
-2
0/100
-2
0/100
-2
0/100
-2
0/100
-2
Protective filter — — — — Built-in laser beam filter
Main unit Tube lens 1X 1X 1X -2X zoom 1X -2X zoom 1X 1X 1X 1X
Applicable YAG laser 1064/532/355nm — 1064/532/ 1064/532/ 1064/532/ 1064/532/
(when using optional tube) 355nm 355nm 355nm 355nm
Camera mount Adapter B (C-mount)
-3
— C-mount receptacle
(use a laser with the TV port.) (with green filter switch)
Illumination system Reflective illumination for bright field (Koehler illumination, with aperture diaphragm)
Light source 12V100W fiber optics, (non-stepped adjustment), light guide length 1.5m, power consumption 150W
Objectives
-3
For observation M Plan Apo
-4
, M Plan Apo SL, G Plan Apo
For laser-cutting — M/LCD Plan NIR
-5
,M Plan UV
M/LCD Plan NUV
-5
Loading weight
14.5kg 13.6kg 14.1kg 13.2kg
14.5kg 13.6kg 14.1kg 13.2kg
on optical tube
-6
Mass (main unit) 6.1kg 7.1kg 6.6kg 7.5kg 6.1kg 7.1kg 6.6kg 7.5kg
-1: Eyepiece/CCD camera
-2: Eyepiece/laser
-3: Optional
-4: M Plan Apo 1x should be used together with the the polarizer (378-092).
-5: Select model depending on the type of laser wavelength.
-6: Weight of objective lenses and eyepieces not included.
FS-70
SERIES 378 — Microscope Unit for Semiconductor Inspection
FEATURES
• The optical system that has originally developed for the best
seller FS 60 models was further enhanced for the FS70 models.
It is ideal as a microscope unit of a prober station for
semiconductors. (All models CE marked.)
• The FS70L supports three types of YAG laser wavelength ranges
(1064nm, 532nm and 355nm), while the FS70L4 supports two
types of wavelength ranges (532nm and 266nm), thus
expanding a scope of laser applications, allowing laser-cutting
of thin-films used in semiconductors and liquid crystal
substrates. However, Mitutoyo assumes no responsibility
whatsoever for the performance and/or safety of the laser
system used with Mitutoyo microscopes. a careful examination
is recommended in selecting a laser-emission unit.
• Bright field, Differential Interference Contrast (DIC) and
polarized observations are standard with the FS70Z. The FS70L
and FS70L4 do not support the DIC method.
• By employing an inward revolver, the long working distance
objectives provide excellent operatability.
• An ergonomic design with superb operatability: the FS70
employs the erect-image optical system (the image in the field
of view has the same orientation as the specimen) and enlarged
fine focus adjustment wheel with rubber grip coarse
adjustment knob.
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