
RefertotheHyperMF/MF-Uleaet(E4267)for
more details.
Hyper MF/MF-U
SERIES 176 — High-Accuracy Measuring Microscopes
Hyper MF-U
with optional optical tube,
turretandobjectives
FEATURES
•TheworldhighestaccuracyXYmeasuring
accuracyof(0.9+3L/1000)µm
•SelectableLAF(LaserAutoFocus)function
•Highoperabilityandrepeatability
•Three-axismotorizedcontrol
•Power-driveautofocusunitisastandard
feature.
Technical Data: Hyper MF-U
Observation image: Erect image
Optical tube: Siedentoph type (pupil distance
adjustment:51-76mm),1Xtube
lens,
Binocular tube (depression: 25˚),
Reticleprojectionmethod,withTV
mount, Optical path ratio (eyepiece/
TV mount: 50/50)
Eyepiece lens: 10X (field No.: 24mm),
Optional: 15X, 20X
Turret (optional): Power
Objective(optional):M/BDPlanApo
objectivefrom1Xto100X(Refer to
page J-36 for more details.)
Transmitted illumination
•Lightsource: Halogenbulb(12V,100W)
•Opticalsystem: Telecentricilluminationwithadjustable
aperture diaphragms
•Functions: Lightintensityadjustable,100steps
brightnessadjustment
Surface illumination
•Lightsource: Halogenbulb(12V,50W)
•Opticalsystem: Koehlerilluminationwithadjustable
aperture diaphragms
•Functions: Lightintensityadjustable,100steps
brightnessadjustment
Dataoutput: ViaRS-232Cinterface
Powersupply: 100/110/120/220/240VAC,50/60Hz
Dimensions: 880x913x770mm (main unit)
160x476x381 (power unit)
Mass: 255kg (main unit), 14kg (power unit)
Technical Data: Hyper MF
Observation image: Erect image
Optical tube: Monocular or binocular tube (optional,
depression:25˚),Reticleprojection
method, with TV mount, Optical path
ratio (eyepiece/TV mount: 50/50)
Eyepiece lens (optional): 10X, 15X, 20X
Objective: 3X(375-037-1), W.D.: 77.0mm
Optional: 1X, 5X 10X, 20X, 50X,
100X
Transmitted illumination
•Lightsource: Halogenbulb(12V,100W)
(fiber-optic cold light illumination)
•Opticalsystem: Telecentricilluminationwithadjustable
aperture diaphragms
•Functions: Lightintensityadjustable,100steps
brightnessadjustment
Surface illumination
•Lightsource: Halogenbulb(12V,50W)
•Opticalsystem: Koehlerilluminationwithadjustable
aperture diaphragms
•Functions: Lightintensityadjustable,100steps
brightnessadjustment
Dataoutput: ViaRS-232Cinterface
Powersupply: 100/110/120/220/240VAC,50/60Hz
Dimensions: 880x913x730mm (main unit)
160x476x381 (power unit)
Mass: 250kg (main unit), 14kg (power unit)
SPECIFICATIONS
Model No.
HyperMF-B2515B
HyperMF-UB2515B HyperMF-UD2515B HyperMF-UE2515B HyperMF-UF2515B
Order No. (mm) 176-430* 176-431* 176-432* 176-433* 176-434*
Observation type BF BF BForBF/BD BF BForBF/BD
Digital counter — — — — —
Laserautofocusfunction — — — Available Available
XY stage travel range 250 x 150mm 250 x 150mm 250 x 150mm 250 x 150mm 250 x 150mm
Measuring unit Linearencoder Linearencoder Linearencoder Linearencoder Linearencoder
Resolution 0.01µm 0.01µm 0.01µm 0.01µm 0.01µm
Measuringaccuracy(at20˚C) (0.9+3L/1000)µm,L=XYaxismeasuringlength(mm)whennotloaded
Drive system (X, Y, Z-axis) Motor-drivercontrolwiththejoystick
XYstagetopsize 460 x 350mm 460 x 350mm 460 x 350mm 460 x 350mm 460 x 350mm
Effectiveglasssize 300 x 200mm 300 x 200mm 300 x 200mm 300 x 200mm 300 x 200mm
Swiveling function ±3˚ ±3˚ ±3˚ ±3˚ ±3˚
Max. stage loading 30kg 30kg 30kg 30kg 30kg
Max. workpiece height 150mm 150mm 150mm 150mm 150mm
*TodenoteyourACpowercableaddthefollowingsufxestotheorderNo.:AforUL/CSA,C for Taiwan, DforCEE,DCforCCC,E for BS, K for EK, No suffix is
required for JIS/100V
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